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1

Micro-liquid flow sensor

Theo S.J. Lammerink, Niels R. Tas, Miko Elwenspoek, Jan H.J. Fluitman

Journal:

Sensors and Actuators A: Physical

Year:

1993

Language:

english

File:

PDF, 985 KB

english, 1993

2

Shrinkage Control of Photoresist for Large-Area Fabrication of Sub-30 nm Periodic Nanocolumns

Le-The, Hai, Berenschot, Erwin, Tiggelaar, Roald M., Tas, Niels R., van den Berg, Albert, Eijkel, Jan C. T.

Journal:

Advanced Materials Technologies

Year:

2017

Language:

english

File:

PDF, 3.10 MB

english, 2017

3

Combining retraction edge lithography and plasma etching for arbitrary contour nanoridge fabrication

Zhao, Yiping, Jansen, Henri, de Boer, Meint, Berenschot, Erwin, Bouwes, Dominique, Gironès, Miriam, Huskens, Jurriaan, Tas, Niels

Journal:

Journal of Micromechanics and Microengineering

Year:

2010

Language:

english

File:

PDF, 5.32 MB

english, 2010

4

3D Fractals as SERS Active Platforms: Preparation and Evaluation for Gas Phase Detection of G-Nerve Agents

Lafuente, Marta, Berenschot, Erwin, Tiggelaar, Roald, Mallada, Reyes, Tas, Niels, Pina, Maria

Journal:

Year:

2018

Language:

english

File:

PDF, 5.89 MB

english, 2018

5

Modeling, design and testing of the electrostatic shuffle motor

Niels Tas, Jeroen Wissink, Louis Sander, Theo Lammerink, Miko Elwenspoek

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 952 KB

english, 1998

6

Capillarity at the nanoscale

van Honschoten, Joost W., Brunets, Nataliya, Tas, Niels R.

Journal:

Chemical Society Reviews

Year:

2010

Language:

english

File:

PDF, 1.81 MB

english, 2010

7

3D Nanofabrication: 3D Nanofabrication of Fluidic Components by Corner Lithography (Small 24/2012)

Berenschot, Erwin J. W., Burouni, Narges, Schurink, Bart, van Honschoten, Joost W., Sanders, Remco G. P., Truckenmuller, Roman, Jansen, Henri V., Elwenspoek, Miko C., van Apeldoorn, Aart A., Tas, Niel

Journal:

Year:

2012

File:

PDF, 5.95 MB

2012

8

Fabrication of 3D fractal structures using nanoscale anisotropic etching of single crystalline silicon

Berenschot, Erwin J W, Jansen, Henri V, Tas, Niels R

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 2.00 MB

english, 2013

9

Long-Range Energy Propagation in Nanometer Arrays of Light Harvesting Antenna Complexes

Escalante, Maryana, Lenferink, Aufried, Zhao, Yiping, Tas, Niels, Huskens, Jurriaan, Hunter, C. Neil, Subramaniam, Vinod, Otto, Cees

Journal:

Year:

2010

Language:

english

File:

PDF, 4.54 MB

english, 2010

10

[NATO Science for Peace and Security Series C: Environmental Security] Transport and Reactivity of Solutions in Confined Hydrosystems || Ionic and Molecular Transport Through Graphene Membranes

Mercury, Lionel, Tas, Niels, Zilberbrand, Michael

Year:

2014

Language:

english

File:

PDF, 250 KB

english, 2014

11

[IEEE 2016 IEEE 19th International Conference on Intelligent Transportation Systems (ITSC) - Rio de Janeiro, Brazil (2016.11.1-2016.11.4)] 2016 IEEE 19th International Conference on Intelligent Transportation Systems (ITSC) - Robot operating system: A modular software framework for automated driving

Hellmund, Andre-Marcel, Wirges, Sascha, Tas, Omer Sahin, Bandera, Claudio, Salscheider, Niels Ole

Year:

2016

Language:

english

File:

PDF, 1.51 MB

english, 2016

12

Elasto-Capillary Folding Using Stop-Programmable Hinges Fabricated by 3D Micro-Machining

Legrain, Antoine, Berenschot, Erwin J. W., Tas, Niels R., Abelmann, Leon, Mishra, Yogendra Kumar

Journal:

Year:

2015

Language:

english

File:

PDF, 9.49 MB

english, 2015

13

Self-Assembled Three-Dimensional Non-Volatile Memories

Abelmann, Leon, Tas, Niels, Berenschot, Erwin, Elwenspoek, Miko

Journal:

Year:

2010

Language:

english

File:

PDF, 3.14 MB

english, 2010

14

Three-Dimensional Fractal Geometry for Gas Permeation in Microchannels

Malankowska, Magdalena, Schlautmann, Stefan, Berenschot, Erwin, Tiggelaar, Roald, Pina, Maria, Mallada, Reyes, Tas, Niels, Gardeniers, Han

Journal:

Year:

2018

Language:

english

File:

PDF, 2.71 MB

english, 2018

15

High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology

Sarajlic, Edin, Yamahata, Christophe, Berenschot, Erwin, Tas, Niels, Fujita, Hiroyuki, Krijnen, Gijs

Journal:

Year:

2010

Language:

english

File:

PDF, 668 KB

english, 2010

16

[IEEE 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Vancouver, BC, Canada (2020.1.18-2020.1.22)] 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Massive Parallel NEMS Flow Restriction Fabricated Using Self-Aligned 3D-Crystallographic Nanolithography

van Kampen, Chris P., Berenschot, Erwin J., Burger, Gert-Jan, Tiggelaar, Roald M., Sanders, Remco G., Gardeniers, Han G., Tas, Niels R.

Year:

2020

File:

PDF, 3.00 MB

2020

17

Large-Area Nanoscale Patterning of Functional Materials by Nanomolding in Capillaries

Xuexin Duan, Yiping Zhao, Erwin Berenschot, Niels R. Tas, David N. Reinhoudt, Jurriaan Huskens

Journal:

Advanced Functional Materials

Year:

2010

Language:

english

File:

PDF, 671 KB

english, 2010

18

Electrokinetic pumping and detection of low-volume flows in nanochannels

Petra Mela, Niels R. Tas, Erwin J. W. Berenschot, Jan van Nieuwkasteele, Albert van den Berg

Journal:

ELECTROPHORESIS

Year:

2004

Language:

english

File:

PDF, 268 KB

english, 2004

19

Sub-10 nm silicon ridge nanofabrication by advanced edge lithography for NIL applications

Yiping Zhao, Erwin Berenschot, Henri Jansen, Niels Tas, Jurriaan Huskens, Miko Elwenspoek

Journal:

Microelectronic Engineering

Year:

2009

Language:

english

File:

PDF, 330 KB

english, 2009

20

RIE lag in high aspect ratio trench etching of silicon

Henri Jansen, Meint de Boer, Remco Wiegerink, Niels Tas, Edwin Smulders, Christina Neagu, Miko Elwenspoek

Journal:

Microelectronic Engineering

Year:

1997

Language:

english

File:

PDF, 552 KB

english, 1997

21

Capillary Negative Pressure Measured by Nanochannel Collapse

Tas, Niels R., Escalante, Maryana, van Honschoten, Joost W., Jansen, Henri V., Elwenspoek, M.

Journal:

Year:

2010

Language:

english

File:

PDF, 1.90 MB

english, 2010

22

Fabrication of micron-sized tetrahedra by Si〈1 1 1〉 micromachining and retraction edge lithography

Kozhummal, Rajeevan, Berenschot, Erwin, Jansen, Henri, Tas, Niels, Zacharias, Margit, Elwenspoek, Miko

Journal:

Journal of Micromechanics and Microengineering

Year:

2012

Language:

english

File:

PDF, 1.52 MB

english, 2012

23

3D Nanofabrication of Fluidic Components by Corner Lithography

Erwin J. W. Berenschot, Narges Burouni, Bart Schurink, Joost W. van Honschoten, Remco G. P. Sanders, Roman Truckenmuller, Henri V. Jansen, Miko C. Elwenspoek, Aart A. van Apeldoorn, Niels R. Tas

Journal:

Year:

2012

Language:

english

File:

PDF, 4.15 MB

english, 2012

24

[IEEE 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Sanya, China (2008.01.6-2008.01.9)] 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - 3D-nanomachining using corner lithography

Berenschot, Erwin, Tas, Niels R., Jansen, Henri V., Elwenspoek, Miko

Year:

2008

Language:

english

File:

PDF, 255 KB

english, 2008

25

Micromachined Fabry−Pérot Interferometer with Embedded Nanochannels for Nanoscale Fluid Dynamics

van Delft, Koen M., Eijkel, Jan C. T., Mijatovic, Dragana, Druzhinina, Tamara S., Rathgen, Helmut, Tas, Niels R., van den Berg, Albert, Mugele, Frieder

Journal:

Year:

2007

Language:

english

File:

PDF, 552 KB

english, 2007

26

Wafer-scale fabrication of nanoapertures using corner lithography

Burouni, Narges, Berenschot, Erwin, Elwenspoek, Miko, Sarajlic, Edin, Leussink, Pele, Jansen, Henri, Tas, Niels

Journal:

Year:

2013

Language:

english

File:

PDF, 2.28 MB

english, 2013

27

[NATO Science for Peace and Security Series C: Environmental Security] Transport and Reactivity of Solutions in Confined Hydrosystems || Micro-CT Analysis to Explore Salt Precipitation Impact on Porous Media Permeability

Mercury, Lionel, Tas, Niels, Zilberbrand, Michael

Year:

2014

Language:

english

File:

PDF, 609 KB

english, 2014

28

Capillary filling of sub-10 nm nanochannels

Haneveld, Jeroen, Tas, Niels R., Brunets, Nataliya, Jansen, Henri V., Elwenspoek, Miko

Journal:

Journal of Applied Physics

Year:

2008

Language:

english

File:

PDF, 497 KB

english, 2008

29

Stiction in surface micromachining

Tas, Niels, Sonnenberg, Tonny, Jansen, Henri, Legtenberg, Rob, Elwenspoek, Miko

Journal:

Journal of Micromechanics and Microengineering

Year:

1996

Language:

english

File:

PDF, 592 KB

english, 1996

30

[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - A UHF 4th-order band-pass filter based on contour-mode PZT-on-Silicon resonators

Yagubizade, Hadi, Darvishi, Milad, Elwenspoek, Miko C., Tas, Niels R.

Year:

2014

Language:

english

File:

PDF, 1.49 MB

english, 2014

31

Capillarity Induced Negative Pressure of Water Plugs in Nanochannels

Tas, Niels R., Mela, Petra, Kramer, Tobias, Berenschot, J. W., van den Berg, Albert

Journal:

Year:

2003

Language:

english

File:

PDF, 132 KB

english, 2003

32

Solution Titration by Wall Deprotonation during Capillary Filling of Silicon Oxide Nanochannels

Janssen, Kjeld G. H., Hoang, Hanh T., Floris, Jan, de Vries, Jeroen, Tas, Niels R., Eijkel, Jan C. T., Hankemeier, Thomas

Journal:

Analytical Chemistry

Year:

2008

Language:

english

File:

PDF, 315 KB

english, 2008

33

Integrated Microfluidic System Enabling (Bio)chemical Reactions with On-Line MALDI-TOF Mass Spectrometry

Brivio, Monica, Fokkens, Roel H., Verboom, Willem, Reinhoudt, David N., Tas, Niels R., Goedbloed, Martijn, van den Berg, Albert

Journal:

Analytical Chemistry

Year:

2002

Language:

english

File:

PDF, 376 KB

english, 2002

34

AFM Cantilever with in Situ Renewable Mercury Microelectrode

Schön, Peter, Geerlings, Joël, Tas, Niels, Sarajlic, Edin

Journal:

Analytical Chemistry

Year:

2013

Language:

english

File:

PDF, 301 KB

english, 2013

35

Limits of miniaturization: Assessing ITP performance in sub-micron and nanochannels

Janssen, Kjeld G. H., Li, Jiajie, Hoang, Hanh T., Vulto, Paul, van den Berg, Richard J. B. H. N., Overkleeft, Herman S., Eijkel, Jan C.T., Tas, Niels R., van der Linden, Heiko J., Hankemeier, Thomas

Journal:

Year:

2012

Language:

english

File:

PDF, 542 KB

english, 2012

36

A MALDI-chip integrated system with a monitoring window

Brivio, Monica, Tas, Niels R., Goedbloed, Martijn H., Gardeniers, Han J. G. E., Verboom, Willem, van den Berg, Albert, Reinhoudt, David N.

Journal:

Year:

2005

Language:

english

File:

PDF, 377 KB

english, 2005

37

[IEEE 2014 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Waikiki Beach, HI, USA (2014.4.13-2014.4.16)] The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Fabrication of 2D-extruded fractal structures using repeated corner lithography and etching

Berenschot, Erwin J. W., Yagubizade, Hadi, Jansen, Henri V., Dijkstra, Marcel, Tas, Niels R.

Year:

2014

Language:

english

File:

PDF, 1.62 MB

english, 2014

38

1-D Nanochannels fabricated in polyimide

Eijkel, Jan C. T., Bomer, Johan, Tas, Niels R., van den Berg, Albert

Journal:

Year:

2004

Language:

english

File:

PDF, 279 KB

english, 2004

39

[IEEE 2011 IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Kaohsiung, Taiwan (2011.02.20-2011.02.23)] 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Dimensional control in corner lithography for wafer-scale fabrication of nano-apertures

Burouni, Narges, Berenschot, Erwin, Elwenspoek, Miko, Tas, Niels

Year:

2011

Language:

english

File:

PDF, 280 KB

english, 2011

40

[IEEE 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Kyoto, Japan (2012.03.5-2012.03.8)] 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Pyramidal nanowire tip for atomic force microscopy and thermal imaging

Burouni, Narges, Sarajlic, Edin, Siekman, Martin, Abelmann, Leon, Tas, Niels

Year:

2012

Language:

english

File:

PDF, 873 KB

english, 2012

41

[IEEE 2012 IEEE 12th International Conference on Nanotechnology (IEEE-NANO) - Birmingham, United Kingdom (2012.08.20-2012.08.23)] 2012 12th IEEE International Conference on Nanotechnology (IEEE-NANO) - 3D nanofabrication of components by repeated corner lithography: Self aligned sub-50nm apertures

Burouni, Narges, Berenschot, Erwin, Elwenspoek, Miko, Tas, Niels R.

Year:

2012

Language:

english

File:

PDF, 1.08 MB

english, 2012

42

A 4th-order band-pass filter using differential readout of two in-phase actuated contour-mode resonators

Yagubizade, Hadi, Darvishi, Milad, Elwenspoek, Miko C., Tas, Niels R.

Journal:

Applied Physics Letters

Year:

2013

Language:

english

File:

PDF, 1.40 MB

english, 2013

43

Wet anisotropic etching for fluidic 1D nanochannels

Haneveld, Jeroen, Jansen, Henri, Berenschot, Erwin, Tas, Niels, Elwenspoek, Miko

Journal:

Journal of Micromechanics and Microengineering

Year:

2003

Language:

english

File:

PDF, 639 KB

english, 2003

44

[NATO Science for Peace and Security Series C: Environmental Security] Transport and Reactivity of Solutions in Confined Hydrosystems || Interactions in Water Across Interfaces: From Nano to Macro-Scale Perspective

Mercury, Lionel, Tas, Niels, Zilberbrand, Michael

Year:

2014

Language:

english

File:

PDF, 380 KB

english, 2014

45

[NATO Science for Peace and Security Series C: Environmental Security] Transport and Reactivity of Solutions in Confined Hydrosystems || Shaping the Interface – Interactions Between Confined Water and the Confining Solid

Mercury, Lionel, Tas, Niels, Zilberbrand, Michael

Year:

2014

Language:

english

File:

PDF, 298 KB

english, 2014

46

[IEEE 2014 IEEE 14th International Conference on Nanotechnology (IEEE-NANO) - Toronto, ON, Canada (2014.8.18-2014.8.21)] 14th IEEE International Conference on Nanotechnology - Fabrication of novel AFM probe with high-aspect-ratio ultra-sharp three-face silicon nitride tips

Vermeer, Rolf, Berenschot, Erwin, Sarajlic, Edin, Tas, Niels, Jansen, Henri

Year:

2014

Language:

english

File:

PDF, 2.18 MB

english, 2014

47

[NATO Science for Peace and Security Series C: Environmental Security] Transport and Reactivity of Solutions in Confined Hydrosystems || Evaporation-Induced Cavitation in Nanofluidic Channels: Dynamics and Origin

Mercury, Lionel, Tas, Niels, Zilberbrand, Michael

Year:

2014

Language:

english

File:

PDF, 323 KB

english, 2014

48

[IEEE 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Shanghai, China (2016.1.24-2016.1.28)] 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Nano-pyramid arrays for nano-particle trapping

Sun, Xingwu, Veltkamp, Henk-Willem, Berenschot, Erwin J. W., Gardeniers, Han J. G. E., Tas, Niels R

Year:

2016

File:

PDF, 1.32 MB

2016

49

SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachined Devices and Components VI - Toward thermal flow-sensing with pL/s resolution

Tas, Niels R., Lammerink, Theo S. J., Leussink, Pele J., Berenschot, J. W., de Bree, H. E., Elwenspoek, Miko C., Peeters, Eric, Paul, Oliver

Year:

2000

Language:

english

File:

PDF, 1.37 MB

english, 2000

50

Let’s twist again: elasto-capillary assembly of parallel ribbons

Legrain, Antoine, Berenschot, Erwin, Abelmann, Leon, Bico, Jose, Tas, Niels R.

Journal:

Year:

2016

Language:

english

File:

PDF, 4.04 MB

english, 2016

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